Model Order Reduction of Microactuators: Theory and Application

This paper provides an overview of techniques compact modeling via model order reduction (MOR), emphasizing their application to cooperative microactuators. MOR creates highly efficient yet accurate surrogate models, facilitating design studies, optimization, closed-loop control and analyses interacting components. is particularly important for microactuators due the variety physical effects employed, short time constants many nonlinear effects. Different approaches linear, parametric dynamical systems are summarized. Three numerical case studies selected methods complement paper. The described emerged from Kick Catch research project within a framework German Research Foundation’s Priority Program, Cooperative Multistable Multistage Microactuator Systems (KOMMMA).